https://ogma.newcastle.edu.au/vital/access/ /manager/Index ${session.getAttribute("locale")} 5 A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:11600 Wed 11 Apr 2018 16:55:56 AEST ]]> A MEMS nanopositioner with thermal actuator and on-chip thermal sensor https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:12644 Tue 01 May 2018 12:14:58 AEST ]]> Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:17966 Sat 24 Mar 2018 07:56:22 AEDT ]]> Bidirectional electrothermal actuator with Z-shaped beams https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:21524 Sat 24 Mar 2018 07:50:28 AEDT ]]> Analysis of nonlinear phenomena in a thermal micro-actuator with a built-in thermal position sensor https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:22561 Sat 24 Mar 2018 07:14:48 AEDT ]]> A 2-DOF MEMS ultrasonic energy harvester https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:18115 Mon 20 Nov 2023 15:46:46 AEDT ]]>